Semiconductor manufacturing involves layer formation on silicon wafers to form integrated circuits, with contamination control crucial for product yields and quality through heating, seeds, thermal oxidation, masking, and etching.
In semiconductor manufacturing, Real-Time Monitoring Systems can help reduce costs, yield losses, and time waste. Water is an essential process tool, with leading-edge fabs using up to 3,000 liters per 300mm wafer.
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Semiconductor Manufacturing
In semiconductor manufacturing, layers are formed on a single silicon wafer, and Integrated Circuits (ICs) are formed. For product yields and quality, it’s crucial to control contamination, especially particulate contamination, because unmonitored contamination can ruin them.
Wafer Production
A semiconductor is made up of silicon wafers, which are thin, round slices of silicon. Purified polycrystalline silicon is heated to molten liquid before a tiny solid silicon seed is added to form a single crystal ingot. The crystal ingot is then processed into uniform-diameter wafers.
Wafer Fabrication
Semiconductor manufacturing begins with the wafer fabrication facility, where integrated circuits are made. In a cleanroom, fabrication takes place in a series of steps:
Thermal Oxidation or Deposition
For high-yield products, wafers are cleaned first with high-purity chemicals and then exposed to ultrapure oxygen in diffusion furnaces to make silicon dioxide.
Masking (Photolithography)
Photoresist films are used to cover a wafer’s surface, while a photo aligner aligns the wafer with the mask, revealing the desired pattern.
Etching
During etching, areas not protected by hardened photoresists are removed with chemical solutions or plasma and then carefully inspected for image transfer.
Liquid Contamination Monitoring and Control
Liquid contamination management is vital at various stages of semiconductor manufacturing. Here’s how to monitor and control liquid contamination:
Chemical Quality
To ensure chemical cleanliness liquid particle counters are crucial tools for ensuring the cleanliness of chemicals used in wafer fabrication’s early stages.
Operator Contamination
Even strict cleanroom protocols can introduce particulate contamination, so monitoring wafer interaction points and using air particle counters will help track it.
Contamination Monitoring In Real-Time
Real-time monitoring systems are essential in semiconductor manufacturing for detecting contamination and implementing prompt mitigation actions to ensure product integrity and yield.
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